A method for fabricating a capacitor of a semiconductor device which stabilizes the operation of electrodes of the capacitor and improves the operational characteristic and reliability of the semiconductor device. The method comprises the steps of: preparing a semiconductor substrate; forming...http://www.google.es/patents/US5702970?utm_source=gb-gplus-sharePatente US5702970 - Method for fabricating a capacitor of a semiconductor device
Method for fabricating a capacitor of a semiconductor device
