A method of making a semiconductor device is disclosed. An upper surface of a semiconductor body is amorphized and a liner is formed over the amorphized upper surface. The upper surface can then be annealed. A transistor is formed at the upper surface....http://www.google.es/patents/US7678630?utm_source=gb-gplus-sharePatente US7678630 - Strained semiconductor device and method of making same
Strained semiconductor device and method of making same
