The present disclosure provides methods and apparatus useful in depositing materials on batches of microfeature workpieces. One implementation provides a method in which a quantity of a first precursor gas is introduced to an enclosure at a first enclosure pressure. The pressure within the enclosure...http://www.google.es/patents/US20060115957?utm_source=gb-gplus-sharePatente US20060115957 - Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces
Microfeature workpiece processing apparatus and methods for controlling ...
Número de solicitud: 11/327,794 Número de publicación: US 2006/0115957 A1 Fecha de presentación: 6 Ene 2006 Patente emitida: US7279398 ( Fecha de emisión 9 Oct 2007)
