A compound semiconductor epitaxial substrate and a process for producing the same are provided. The compound semiconductor epitaxial substrate comprises a single crystal substrate, a lattice mismatch compound semiconductor layer and a stress compensation layer, wherein the lattice mismatch compound semiconductor...http://www.google.es/patents/US8169004?utm_source=gb-gplus-sharePatente US8169004 - Compound semiconductor epitaxial substrate and process for producing the same
Compound semiconductor epitaxial substrate and process for producing the same
