A vertical type vapor-phase growth apparatus comprises a vapor-phase growth reactor constituted of an upper section defining an upper chamber having a lateral cross-section of about 200 cm.sup.2 and a lower section defining a lower chamber having a lateral cross-sectional area greater than, but smaller...http://www.google.es/patents/US4290385?utm_source=gb-gplus-sharePatente US4290385 - Vertical type vapor-phase growth apparatus
