A method for configuring J electromagnetic radiation sources (J≧2) to serially irradiate a substrate. Each source has a different function of wavelength and angular distribution of emitted radiation. The substrate includes a base layer and I stacks (I≧2; J≦I) thereon. Pj denotes a same source-specific...http://www.google.es/patents/US7635656?utm_source=gb-gplus-sharePatente US7635656 - Serial irradiation of a substrate by multiple radiation sources
Serial irradiation of a substrate by multiple radiation sources
