The invention provides an apparatus and method for performing a process on a substrate. At least two types of structures may be used to provide a flow path for a substrate so that the substrate may be moved from one processing or loading position to another. The first is a conveyor. The second is a track....http://www.google.es/patents/US6235634?utm_source=gb-gplus-sharePatente US6235634 - Modular substrate processing system
