A method for producing a corrosion-resistant channel in a wetted path of a silicon device enables such device to be used with corrosive compounds, such as fluorine. A wetted path of a MEMS device is coated with either (1) an organic compound resistant to attack by atomic fluorine or (2) a material capable...http://www.google.es/patents/US6869818?utm_source=gb-gplus-sharePatente US6869818 - Method for producing and testing a corrosion-resistant channel in a silicon device
Method for producing and testing a corrosion-resistant channel in a silicon ...
