An electrostatically actuated valve that is relatively small, has relatively low fabrication costs, and consumes relatively low voltage and/or power. Normally closed, normally open, three (or more) way valves, and other configurations are contemplated. These electrostatically actuated valves are suitable...http://www.google.es/patents/US6968862?utm_source=gb-gplus-sharePatente US6968862 - Electrostatically actuated valve
