An exposure amount control device for controlling an integrated exposure amount of pulsed light to a photosensitive substrate within a predetermined range in which a pattern of a mask is successively exposed on the substrate by synchronously scanning the mask forming the pattern to be exposed and the...http://www.google.es/patents/US6104474?utm_source=gb-gplus-sharePatente US6104474 - Apparatus and method for controlling scanning exposure of photosensitive substrate
Apparatus and method for controlling scanning exposure of photosensitive ...
