A method for forming a contact opening is described and which includes providing a node location to which electrical connection is to be made; forming a conductive line adjacent the node location, the conductive line having a conductive top and sidewall surfaces; forming electrically insulative oxide...http://www.google.es/patents/US5885890?utm_source=gb-gplus-sharePatente US5885890 - Method of forming contact openings and an electric component formed from the same and other methods
Method of forming contact openings and an electric component formed from the ...
