The invention specifically relates to methods of fabricating a composite substrate by providing a first insulating layer on a support substrate at a thickness of e1 and providing a second insulating layer on a source substrate at a thickness of e2, with each layer having an exposed face for bonding;...http://www.google.es/patents/US7736993?utm_source=gb-gplus-sharePatente US7736993 - Composite substrate and method of fabricating the same
Composite substrate and method of fabricating the same
