A system and method for exposing a radiation sensitive layer to one or more repetitious design cells. Each design cell includes at least one design shape on at least one buildlevel. Each shape represents a circuit shape, or part of a circuit shape on an integrated circuit layer in a circuit on an integrated...http://www.google.es/patents/US5294800?utm_source=gb-gplus-sharePatente US5294800 - E-beam control data compaction system and method
