A system for inspecting semiconductor wafers of at least one lot of semiconductor wafers for proper integrated circuit fabrication includes multiple different inspection stations. Each of the different inspection stations inspects a respective integrated circuit fabrication feature of a semiconductor...http://www.google.es/patents/US6320402?utm_source=gb-gplus-sharePatente US6320402 - Parallel inspection of semiconductor wafers by a plurality of different inspection stations to maximize throughput
Parallel inspection of semiconductor wafers by a plurality of different ...
