A method of manufacturing first and second substrates that are coupled together, e.g., an active and passive plate of a flat panel display. The active plate is formed according to a standard pattern and inspected. The passive plate is then formed by modifying the pattern data for the passive plate according...http://www.google.es/patents/US7116398?utm_source=gb-gplus-sharePatente US7116398 - Lithographic apparatus and device manufacturing method
Lithographic apparatus and device manufacturing method
