An apparatus includes a reaction chamber installed in a reaction furnace; a discharge port for removing from the reaction chamber reaction byproducts formed during producing of the semiconductor device; a heater for generating heat to the reaction chamber; and a hot fluid supply unit for introducing...http://www.google.es/patents/US6979368?utm_source=gb-gplus-sharePatente US6979368 - Apparatus and method for producing a semiconductor device including a byproduct control system
Apparatus and method for producing a semiconductor device including a ...
