A truncated dummy plate which is suitable for promoting substantially uniform flow of process gases among all regions on the surface of a substrate to facilitate deposition of a film having uniform thickness on the substrate. The truncated dummy plate has a circular shape with a flat edge provided in...http://www.google.es/patents/US20040065261?utm_source=gb-gplus-sharePatente US20040065261 - Truncated dummy plate for process furnace
Número de solicitud: 10/264,492 Número de publicación: US 2004/0065261 A1 Fecha de presentación: 5 Oct 2002 Patente emitida: US6849131 ( Fecha de emisión 1 Feb 2005)
