A thin film thermal print head is fabricated using radio frequency (rf) or direct current (DC) sputtering within a vacuum chamber into which is introduced a partial pressure of argon and nitrogen. Without breaking the vacuum, three consecutive layers comprising respectively tantalum nitride, gold, and...http://www.google.es/patents/US4169032?utm_source=gb-gplus-sharePatente US4169032 - Method of making a thin film thermal print head
