A micropump comprising a pump body including a fluid inlet channel, a fluid outlet channel and pumping reservoir, the fluid inlet channel and the fluid outlet channel communicating with the pumping reservoir, a diaphragm covering the pumping reservoir, a piezoelectric strip actuator attached to the diaphragm...http://www.google.es/patents/US6827559?utm_source=gb-gplus-sharePatente US6827559 - Piezoelectric micropump with diaphragm and valves
