In the first laser beam radiation, a laser beam having a predetermined energy density is scanned on each of predetermined unit irradiated regions at a scanning pitch smaller than the beam size, and in the second laser beam radiation, a laser beam having an energy density lower than that of the laser...http://www.google.es/patents/US5496768?utm_source=gb-gplus-sharePatente US5496768 - Method of manufacturing polycrystalline silicon thin film
Method of manufacturing polycrystalline silicon thin film
