A semiconductor substrate has a cell region and a peripheral circuit region surrounding the cell region. In the cell region a plurality of lower electrodes are connected to a conductive region of the semiconductor substrate, and are arrayed along row and column directions. A dielectric layer is formed...http://www.google.es/patents/US7449740?utm_source=gb-gplus-sharePatente US7449740 - Semiconductor memory device having capacitors and method for forming the same
Semiconductor memory device having capacitors and method for forming the same
