A semiconductor wafer processing system including a multi-chamber module having vertically-stacked semiconductor wafer process chambers and a loadlock chamber dedicated to each semiconductor wafer process chamber. Each process chamber includes a chuck for holding a wafer during wafer processing. The...http://www.google.es/patents/US20020033136?utm_source=gb-gplus-sharePatente US20020033136 - Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system
Semiconductor wafer processing system with vertically-stacked process ...
Número de solicitud: 09/996,869 Número de publicación: US 2002/0033136 A1 Fecha de presentación: 27 Nov 2001 Patente emitida: US6846149 ( Fecha de emisión 25 Ene 2005)
