In one embodiment, a probe card for testing dice on a wafer includes a substrate, a number of cantilevers formed on a surface thereof, and a number of probes extending from unsupported ends of the cantilevers. The unsupported ends of the cantilevers project over cavities on the surface of the substrate....http://www.google.es/patents/US7332921?utm_source=gb-gplus-sharePatente US7332921 - Probe card and method for constructing same
