A typical integrated-circuit fabrication requires interconnecting millions of microscopic transistors and resistors with aluminum wires. Yet, aluminum wires have greater electrical resistance and are less reliable than copper wires. Unfortunately, current techniques for making copper wires are time-consuming...http://www.google.es/patents/US6984891?utm_source=gb-gplus-sharePatente US6984891 - Methods for making copper and other metal interconnections in integrated circuits
Methods for making copper and other metal interconnections in integrated ...
