A pressure activated threshold switch has two electrodes separated by a small distance across a cavity. One of the electrodes is made of a mechanically compliant material. As a uniform pressure is applied to the mechanically compliant electrode, a threshold is reached at which the electrode buckles under...http://www.google.es/patents/US5164558?utm_source=gb-gplus-sharePatente US5164558 - Micromachined threshold pressure switch and method of manufacture
Micromachined threshold pressure switch and method of manufacture