In a capacitance type semiconductor dynamic quantity sensor, a sensor chip and a circuit are connected to each other through adhesive film having an elasticity of 200 MPa or less to reduce the temperature characteristic. Four bonding wires for connecting the sensor chip and the circuit chip are arranged...http://www.google.es/patents/US7339265?utm_source=gb-gplus-sharePatente US7339265 - Capacitance type semiconductor sensor
