A Fabry-Perot interferometer comprises a single crystal silicon substrate (1) with an integrally formed diaphragm (6) supported between walls (2-5). A glass superstrate (14) is mounted adjacent the substrate (1) with a spacer (13) sandwiched therebetween. Facing surfaces (12, 16) of the diaphragm (6)...http://www.google.es/patents/US4825262?utm_source=gb-gplus-sharePatente US4825262 - Fabry-perot interferometer
