Apparatus for non-contact determination of wafer resistance of a semiconductor wafer includes a first sensor element, separated from a surface of the wafer by a first air gap, for capacitively coupling an AC drive signal into a portion of the wafer. A second sensor element, separated from the surface...http://www.google.es/patents/US6809542?utm_source=gb-gplus-sharePatente US6809542 - Wafer resistance measurement apparatus and method using capacitively coupled AC excitation signal
Wafer resistance measurement apparatus and method using capacitively coupled ...
