A wafer heating chuck includes a backplane for mounting the wafer thereon. A rear surface of the backplane includes an outer annular recess with an outer angled wall. An outer annular heater is located within the recess and has an outer surface complementarily angled with respect to the wall. An inner...http://www.google.es/patents/US5595241?utm_source=gb-gplus-sharePatente US5595241 - Wafer heating chuck with dual zone backplane heating and segmented clamping member
Wafer heating chuck with dual zone backplane heating and segmented clamping ...
