A bevel unit comprises CCDs and processing liquid nozzles, and the CCDs take an image of a circumferential edge surface of a substrate. An image processing part detects the distances between the circumferential edge surface of the substrate and the processing liquid nozzles by image processing the signals...http://www.google.es/patents/US7935217?utm_source=gb-gplus-sharePatente US7935217 - Substrate processing apparatus for treating substrate with predetermined processing by supplying processing liquid to rim portion of rotating substrate
Substrate processing apparatus for treating substrate with predetermined ...
