Deposition of LiCoO2

20 .\

12 52 ______________ __ _ 5 24; ________ E % E E § Y <1 X > FIG. 2 ,/,»300

CURRENT COLLECTOR 306 ii 305 UPON 304 * LiCoO2 303 302

SUBSTRATE gm

FIG. 3
LiCOO3 ,_ /602
SUBSTRATE /591
FIG. 6A

LEGO; /602
~6o3
SUBSTRATE \6O1

FIG. 6B

INTENSITY

SYI\/IMORPHIX: XRD Analysis
Li-Co-oxide on <100>Si

Cu K11 rad. 6-26

#931 101-»
0?
20 25 30 35 I ' T45‘ i ' 9'56‘
DIFFRACTIQN ANGLE 29
FIG. 4A

3° coll}

FIG. 4B