In a device for reducing the peak power of a pulsed laser light source, in particular for a projection exposure system, there is arranged in the beam path (1) at least one beam splitter apparatus (3, 4) by means of which a detour line (5 or 11) is produced, via reflecting components (6, 7, 8 or 12, 13,...http://www.google.es/patents/US6996141?utm_source=gb-gplus-sharePatente US6996141 - Device for reducing the peak power of a pulsed laser light source
Device for reducing the peak power of a pulsed laser light source
