(54) METHOD OF FORMING A THIN FILM COMPONENT
(76) Inventors: Randy Hoffman, 2924 NE. Newcastle PI, Corvallis, OR (US) 97330; Peter Mardilovich, 4327 NW. Silverbelle PI, Corvallis, OR (US) 97330; David Punsalan, 1024 Colony Pond Dr., Eugene, OR (US) 97401
( * ) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 109 days.
(21) Appl. No.: 10/977,068
(22) Filed: Oct. 29, 2004
(65) Prior Publication Data
US 2006/0094168 Al May 4, 2006
(51) Int. CI.
H01L 21/84 (2006.01)
(52) U.S. CI 438/164; 438/591; 257/411;
257/E21.177; 257/21.413
(58) Field of Classification Search 438/164,
438/591; 257/411, E21.177, E21.413 See application file for complete search history.
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