Provided is a method and system for facilitating use of a plurality of individually controllable elements to modulate the intensity of radiation received at each focusing element of an array of focusing elements to control the intensity of the radiation in the areas on the substrate onto which the focusing...http://www.google.es/patents/US7133118?utm_source=gb-gplus-sharePatente US7133118 - Lithographic apparatus and device manufacturing method
Lithographic apparatus and device manufacturing method
