[54] METHOD FOR FABRICATING A
PLURALITY OF SEMICONDUCTOR BODIES
[75] Inventor: Volker Haerle, Waldetzenberg, Germany
[73] Assignee: Siemens Aktiengesellschaft, Munich, Germany
[21] Appl. No.: 09/157,649
[22] Filed: Sep. 21, 1998
[30] Foreign Application Priority Data
Sep. 19, 1997 [DE] Germany 197 41 442
[51] Int. C I. H01L 21/00
[52] U.S. CI 438/33; 438/113
[58] Field of Search 438/33, 34, 46,
438/47, 68, 113, 503, 641, 674, 778, 779, 787, 791, 931
[56] References Cited
U.S. PATENT DOCUMENTS
5,013,682 5/1991 Plumton et al. .
5,284,791 2/1994 Sakada et al. .
5,478,774 12/1995 Ackley et al. .
FOREIGN PATENT DOCUMENTS
0 599 224 Al 6/1994 European Pat. Off. .
