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US007145225B2

(12) United States Patent ao) Patent No.: Us 7,145,225 B2

Lee (45) Date of Patent: Dec. 5,2006

(54) INTERPOSER CONFIGURED TO REDUCE THE PROFILES OF SEMICONDUCTOR DEVICE ASSEMBLIES AND PACKAGES INCLUDING THE SAME AND METHODS

(75) Inventor: Teck Kheng Lee, Singapore (SG)

(73) Assignee: Micron Technology, Inc., Boise, ID (US)

( * ) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 361 days.

(21) Appl. No.: 10/150,893

(22) Filed: May 17, 2002

(65) Prior Publication Data

US 2003/0164543 Al Sep. 4, 2003 (30) Foreign Application Priority Data

Mar. 4, 2002 (SG) 200201263

FOREIGN PATENT DOCUMENTS

(51) Int. CI.

H01L 23/02

(2006.01)

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An interposer includes a substrate, first and second sets of contact pads carried by the substrate, and receptacles formed in a surface of the substrate and exposing contact pads of the second set. The interposer may also include conductive traces carried by the substrate to electrically connect corresponding contact pads of the first and second sets. The receptacles are configured to at least partially receive conductive structures, such as solder balls, that are secured to the contact pads of the second set. Thus, the interposer is useful in providing semiconductor device assemblies and packages of reduced height or profile. Such assemblies and packages are also described, as are multi-chip modules including such assemblies or packages. In addition, methods for designing and fabricating the interposer are disclosed, as are methods for forming assemblies, packages, and multichip modules that include the interposer.

(Continued)

36 Claims, 6 Drawing Sheets

21

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OTHER PUBLICATIONS

Australian Search Report dated Nov. 8, 2004 (5 pages). Isaak, H. et al., "Development of Flex Stackable Carriers" IEEE Electronic Components and Technology Conference, 2000 Proceedings 50th, May 21, 2000-May 24, 2000, Las Vegas, NV, USA, pp. 378-384, IEEE Catalog No. 00CH37070.

Copy of Australian Patent Office, Search Report, May 30, 2003, 4 pages.

Lyons et al., "A New Approach to Using Anisotropically Conductive Adhesives for Flip-Chip Assembly, Part A," IEEE Transactions on Components, Packaging, and Manufacturing Technology, vol. 19, Issue 1, Mar. 1996, pp. 5-11. Teo et al., "Enhancing Moisture Resistance of PBGA," Electronic Components and Technology Conference, 1988. 48* IEEE, May 25-28, 1998, pp. 930-935. Teutsch et al, "Wafer Level CSP using Low Cost Electroies Redistribution Layer," Electronic Components and Technology Conference, 2000. 2000 Proceedings. 50* May 21-24, 2000, pp. pp. 107-113.

"The 2003 International Technology Roadmap for Semiconductor: Assembly and Packaging."

Tsui et al., "Pad redistribution technology for flip chip applications," Electronic Components and Technology Conference, 1998. 48th IEEE, May 25-28, 1998, pp. 1098-1102. Xiao et al., "Reliability study and failure analysis of fine pitch solder-bumped flip chip on low-cost flexible substrate without using stiffener," IEEE, 2002. Proceedings 52nd, May 28-31, 2002, pp. 112-118.

Australian Search Report dated Aug. 11, 2004 (3 pages). Australian Search Report dated Aug. 16, 2004 (4 pages). Al-Sarawi et al., "A review of 3-D packaging technology," Components, Packaging, and Manufacturing Technology, Part B: IEEE Transactions on Advanced Packaging, vol. 21, Issue 1, Feb. 1998, pp. 2-14.

Andros et al., "TBGA Package Technology," Components, Packaging, and Manufacturing Technology, Part B: IEEE Transactions on Advanced Packaging, vol. 17, Issue 4, Nov. 1994, pp. 564-568.

Clot et al., "Flip-Chip on Flex for 3D Packaging," 1999. 24th IEEE/CPMT, Oct. 18-19, 1999, pp. 36-41. Ferrando et al., "Industrial approach of a flip-chip method using the stud-bumps with a non-conductive paste," Adhesive Joining and Coating Technology in Electronics Manufacturing, 2000. Proceedings. 4th International Conference on, Jun. 18-21, 2000, pp. 205-211.

Gallagher er al., "A Fully Additive, Polymeric Process for the Fabrication and Assembly of Substrate and Component Level Packaging," The First IEEE International Symposium on Polymeric Electronics Packaging, Oct. 26-30, 1997, pp. 56-63.

Geissinger et al., "Tape Based CSP Package Supports Fine Pitch Wirebonding," Electronics Manufacturing Technology Symposium, 2002, IEMT 2002, 27* Annual IEEE/SEMI International, Jul. 17-18, 2002, pp. 41-452. Hatanaka, H., "Packaging processes using flip chip bonder and future directions of technology development," Electronics Packaging Technology Conference, 2002. 4th, Dec. 10-12, 2002, pp. 434-439.

Haug et al., "Low-Cost Direct Chip Attach: Comparison of SMD Compatible FC Soldering with Anisotropically Conductive Adhesive FC Bonding," IEEE Transactions on Electronics Packaging Manufacturing, vol. 23, No. 1, Jan. 2000, pp. 12-18.

Kloeser et al., "Fine Pitch Stencil Printing of Sn/Pb and Lead Free Solders for Flip Chip Technology," IEEE Transactions ofCPMT—Part C, vol. 21, No. 1, 1998, pp. 41-49. Lee et al., "Enhancement of Moisure Sensitivity Performance of a FBGA," Proceedings of International Symposium on Electronic Materials & Packaging, 2000, pp. 470-475.

Li et al., "Stencil Printing Process Development for Flip Chip Interconnect," IEEE Transactions Part C: Electronics Packaging Manufacturing, vol. 23, Issue 3, (Jul. 2000), pp. 165-170.

* cited by examiner

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