[54] MECHANICAL RESONANCE, SILICON ACCELEROMETER
[75] Inventors: David W. Burns. Minneapolis. Minn.;
Richard H. Frische. Phoenix. Ariz.
[73] Assignee: Honeywell Inc.. Minneapolis. Minn.
[21] Appl. No.: 799,587
[22] Filed: Feb. 10, 1997
Related U.S. Application Data
[63] Continuation of Ser. No. 403,560, Mar. 13, 1995, abandoned, which is a continuation-in-part of Ser. No. 198,332, Feb. 18, 1994, abandoned, which is a division of Ser. No. 48,096, Apr. 15, 1993, Pat. No. 5,396,798.
[51] Int CI.6 G01P 15/08
[52] U.S. CI 73/514.29; 73/514.18;
73/514.38
[58] Field of Search 73/514.29, 514.15.
73/514.32. 514.18. 514.34, 514.38, 862.59
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Primary Examiner—Christine K. Oda
Attorney, Agent, or Firm—John G. Shudy. Jr.
[57] ABSTRACT
A silicon accelerometer includes a plurality of silicon layers. The silicon layers form first and second silicon beams supported by flexure members. An acceleration responsive silicon mass is arranged to bend the flexure members in response to accelerations. The silicon beams are vibrated in vacuum chambers and gas damping is provided for the acceleration responsive mass and the flexure members. A sensor is provided for sensing vibration of the first and second silicon beams.
28 Claims, 13 Drawing Sheets
