Búsqueda Imágenes Maps Play YouTube Noticias Gmail Drive Más »
Búsqueda avanzada de patentes | Imágenes de página | Historial web | Iniciar sesión

Patentes

  

IIIH

US006968862B2

(12) United States Patent (io) Patent No.: US 6,968,862 B2

Cabuz et al. (45) Date of Patent: Nov. 29,2005 Page 2

(54) ELECTROSTATICALLY ACTUATED VALVE

(75) Inventors: Cleopatra Cabuz, Edina, MN (US);

Eugen I. Cabuz, Edina, MN (US)

(73) Assignee: Honeywell International Inc.,

Morristown, NJ (US)

( * ) Notice: Subject to any disclaimer, the term ol this patent is extended or adjusted under 35 U.S.C. 154(b) by 0 days.

(21) Appl. No.: 10/980,685

(22) Filed: Nov. 3, 2004

(65) Prior Publication Data

US 2005/0062001 Al Mar. 24, 2005

Related U.S. Application Data

(62) Division of application No. 10/174,851, filed on Jun. 19, 2002, now Pat. No. 6,837,476.

(51) Int. C I. F16K 1 00

(52) U.S. CI 137/625.48; 137/872; 251/129.01

(58) Field of Search 137/625.48, 872;

251/129.01

[merged small][merged small][merged small][table]
[blocks in formation]

154

[graphic]
[merged small][table][merged small][merged small]

Bustgens, Bacher, Menz, Schomburg, "Micropump Manufactured by Thermoplastic Molding" MEMS 1994, pp. 18-21.

C. Cabuz et al., "Factors Enhancing the Reliability of Touch-Mode Electrostatic Actuators," Sensors and Actuators 79(2000) pp. 245-250.

C. Cabuz et al., "Mesoscopic Sampler Based on 3D Array of
Electrostatically Activated Diaphragms," Proceedings of the
10th Int. Conf. On Solid-State Sensors and Actuators,
Transducers'99, Jun. 7-12, 1999, Sendai Japan.
C. Cabuz et al., "The Double Diaphragm Pump," The 14th
IEEE International Micro Electro Mechanical Systems
conference, MEMS'01, Jan. 21-23, Interlachen,
Switzerland.

C. Cabuz, et al., "High Reliability Touch-Mode Electrostatic
Actuators", Technical Digest ofthe Solid State Sensor and
Actuator Workshop, Hilton Head, S.C., Jun. 8-11, 1998, pp.
296-299.

C. Cabuz. Tradeoffs in MEMS Material (Invited Paper)
Proceedings of the SPIE, vol. 2881, pp. 160-170, Austin,
TX., Jul. 1996.

Cabuz, Cleopatra, "Electrical Phenomena at the Interface of
Rolling-Contact, Electrostatic Actuators", Nanotribology:
Critical Assessment and Research Needs, Kluwer Academic
Publisher, pp. 221-236, Copyright 2003, presented at the
Nanotribology Workshop, Mar. 13-15, 2000.
Cleo Cabuz, "Dielectric Related Effects in Micromachined
Electrostatic Actuators," Annual Report of the IEEE/CEIDP
Society, 1999, Annual Meeting, Austin, Texas, Oct. 17-20,
1999.

Jye-Shane Yang et al., "Fluorescent Porous Polymer Films
as TNT Chemosensors: Electronic and Structural Effects",/.
Am. Chem. Soc, 1998, 120 pages 11864-11873.
Jye-Shane Yang et al., "Porous Shape Persistent Fluorescent
Polymer Films: An Approach to TNT Sensory Materials", /.
Am. Chem. Soc.;, 1998, 120, pp. 5321-5322.
Michael S. Freund et al., "AChemically Diverse Conducting
Polymer-Based 'Electronic Nose'", Proceedings of the
National Academy of Sciences of the United States of
America, vol.92, No. 7, Mar. 28, 1995, pp. 2652-2656.
Minami K et al., "Fabrication of Distributed Electrostatic
Micro Actuator (DEMA)" Journal of Microelectromechani-
cal Systems, US, IEEE Inc., New York, vol. 2, No. 3, Sep.
1, 1993, pp. 121-127, XP000426532, ISSN: 1057-7157.
Porex Technologies, brochure, dated prior to Jun. 2, 2000, 4
pages.

Shikida, Sato, "Characteristics of an ElectrostaticallyDriven Gas Valve Under High Pressure Conditions, IEEE 1994, pp. 235-240.".

Shikida, Sato, Harada, "Fabrication of An S-Shaped Microactuator," Journal of Microelectromechanical Systems, vol. 6, No. 1 (Mar. 1997), pp. 18-24. Shikida, sato, Tanaka, Kawamura, Fujisaki, "Electrostatically Driven Gas Valve With High Conductance", Journal of Microelectromechanical Systems, vol. 3, No. 2 (Jun. 1994), pp. 76-80.

Srinivasan et al., "Self-Assembled Fluorocarbon Films for Enhanced Stiction Reduction", TRANSDUCERS '97, 1997 International Conference on Solid-State Sensors and Actuators, Chicago, Jun. 16-19, 1997, pp. 1399-1402. Wagner, Quenzer, Hoerscelmann, Lisec, Juerss, "Bistable Microvalve with Pneumatically Coupled Membranes," 07803-2985-6/96, IEEE (1996), pp. 384-388.

[graphic][merged small]
[graphic]
« AnteriorContinuar »