An inspection system includes optics, an object support for mounting an object in a region of an object plane of the optics, a bright-field light source, and a dark-field light source. The inspection system also includes an image detector having a radiation sensitive substrate disposed in a region of...http://www.google.es/patents/US8102521?utm_source=gb-gplus-sharePatente US8102521 - Optical inspection system and method
