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EYE TRACKING SYSTEM HAVING AN ARRAY OF
PHOTODETECTORS ALIGNED RESPECTIVELY
WITH AN ARRAY OF PIXELS

5

RELATED APPLICATIONS

This is a continuation-in-part of U.S. Ser. No. 07/851,178, filed Mar. 13, 1992 now abandoned, which is a continuation-in-part of U.S. Ser. No. 07/643,552 filed Jan. 18, 1991 entitled "Light Emitting Diode Bars 10 and Method of making Same" now U.S. Pat. No. 5,300,788 and U.S. Ser. No. 07/636,602 filed Dec. 31, 1990 entitled "Single Crystal Silicon Arrayed Devices for Display Panels" now U.S. Pat. No. 5,206,749 and U.S. Ser. No. 07/834,849 filed Feb. 13, 1992 entitled 15 "High Density Electronic Circuit Modules" now U.S. Pat. No. 5,258,325 and U.S. Ser. No. 07/815,684 filed Dec. 31, 1991, entitled "Single Crystal Silicon Arrayed Devices". Other related applications are U.S. Ser. No. 07/971,399, filed Nov. 4, 1992 entitled "Control System 20 for Display Panels" and U.S. Ser. No. 07/971,352 filed Nov. 4, 1992 entitled "Head Mounted Display System" and U.S. Ser. No. 07/970,675 filed Nov. 4,1992 entitled "Single Crystal Silicon Tiles for Display Panels" now U.S. Pat. No. 5,256,562. All of the above are incorpo- 25 rated herein by reference.

BACKGROUND OF THE INVENTION

Eye tracking systems are useful in flight control, flight simulation and virtual imaging displays. Eye con- 30 trol systems generate information based on the position of the eye with respect to an image on a display. This information is useful for a variety of applications. It can be used to enable the viewer to control "hands-free" movement of a cursor, such as a cross-hair on the dis- 35 play.

Apparatus for detecting the orientation of the eye or determining its line-of-sight (LOS) are called occulometers or eye trackers and are well known in the art. (See for example U.S. Pat. Nos. 4,109,145, 4,034,401 and 40 4,028,725).

SUMMARY OF THE INVENTION

In accordance with the present invention a detector array comprising thin film integrated optical diode de- 45 tectors is formed of III-V materials and transferred directly onto a flat panel active matrix display. The display is preferably either an electroluminescent (EL) or an active matrix liquid crystal display (AMLCD) comprised of thin film transistor driving elements 50 formed of single crystal silicon and then transferred to a transparent glass substrate. The TFT is connected to an electrode which defines a picture element (pixel) of the display.

The detectors are positioned such that each is com- 55 pletely above the drive transistors of the active matrix circuit i.e., adjacent to the pixel area and therefore do not block any of the display's light output. The light output from the display, either infrared or visible, is used to determine the position of the eye. No additional 60 optics, such as, fiber optics to/from remote displays are required in this approach. The chief advantage is that the integrated eyetracker/display can be inserted in a helmet-mounted optical system without physical modification to the helmet or optics. This advantage results 65 from the fundamental reciprocity of the axial light rays that are used to determine the eye position. An axial ray, is a light ray that emanates from the display and travels

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through the optical axis of the eye, normal to the retina. These rays, when reflected by the retina, travel back to the display along the same optical path (by the optical reciprocity theorem). Except for divergence of the rays, the reflected rays return to the vicinity of the emitting pixel. In this way, the detector can identify the area of the display that is sighted by the user. Software in a computer then provides a cursor at this location.

In another alternative embodiment; instead of using the visible scene from the display, some of the frames in the display are used for brief presentation of an interlaced eyetracker pattern. If the repetition rate of the test pattern is sufficiently infrequent, the user (viewer) will not perceive its presence. This pattern may consist of a single pixel being illuminated or may have some other geometric pattern. Light from a single lit pixel enters the eye through the pupil and is reflected from the retina. The path of the reflected light clearly depends on the position of the eye. On the reverse path back to the display panel, the reflected light undergoes spreading or convergence depending upon the optical system. As it returns to the plane of the display, it strikes the photodetectors. A pattern will appear in the output of the photodetector array that depends on the position of the eye and the nature of the optical system. This pattern is interpreted by a computer and correlated to the position of the eye.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic diagram of an eye tracking system of the invention.

FIG. 2 is a schematic of an alternate embodiment of an eye tracking system of the invention.

FIG. 3 is an exploded view of the integrated display/detector array panel (eye-tracker) of the invention.

FIG. 4 is a plan view of a simplified version of the eye tracker in which the matrix array metallization is replaced by a common parallel interconnect.

FIGS. 5A-5C are cross-sectioned views showing important steps in the process of forming the eyetracker device of the invention.

FIG. 6 is a schematic diagram of an alternate embodiment of an eye tracking device of the invention.

DETAILED DESCRIPTION OF THE
INVENTION

Referring now to the schematic diagram of FIG. 1, it may be seen that the present invention relates to an eye tracking system 10 that combines a flat panel display device 12 with an array of optical detectors 14 to form an eye tracker device 100. The flat panel display device is used as a monolithic substrate and light source for determining the position of the eye 32. The detector array 14 is aligned and transferred onto the active matrix electronics of the flat panel device. A test pattern and software in computer 18 analyzes the sensed data generated by the detector on display and determines the position of the eye.

Light from display 12 is used to project an image onto viewing screen 28 for viewing by the eye(s) 32 of a viewer. The image to be displayed is generated in computer 18 and is coupled as an electrical input video signal to display 12 along line 24. Image light rays from display 12 pass through detector array 14 and are projected onto screen 28 where they may be superimposed

3 4

on external images from an outside scene formed by tion is illustrated in FIG. 3. Note that a complete eyelight rays C. tracker package can be made without substantially

A light ray emanating from a particular pixel of dis- changing the overall dimensions of the display. As play 12 is shown as line B2. This ray is reflected by the shown in FIG. 3, a detector array 14 is formed of a Illscreen 28 (line Bl) onto the eye optics (not shown) and 5 V diode array 50 transferred to a glass substrate 52 or on to the macula (not shown) of eye 32. The axial rays directly above and onto front glass 54 of an active maof greatest importance will impinge on the fovea of the trix LCD display 12. The detector pixels 62 are posieye, the most sensitive part of the macula. These rays tioned so that each is completely above the drive tranreturn to the display in the vicinity of the original pixel sistors 64 of the active matrix circuit and therefore do because reflection from the fovea is approximately nor- 10 not block any of the display's light output from pixel mal to the retina and therefore nearly axial. Non-axial electrodes 64. (See FIG. 4). The detector row and colrays which will impinge on the retina beyond the fovea umn interconnects (not shown) are positioned directly will not be reflected back along the axial optical path above the display row and columns, so that the interand will not return to the detector array 14. connect wires do not block any light.

The viewing screen 28 may comprise, for example, 15 Note that the cut-out shown in FIG. 4 is not required

the visor of a heads-up helmet mounted optical system in practice since the detector array substrate 52 is made

for pilots and the integrated detector/display can be of transparent material such as glass or quartz,

inserted in a helmet-mounted optical system without For infrared detection, GaAs appears to be the best

physical modification to the helmet or optics. Addition- choice for the detector elements The bandgap of GaAs

ally, no physical contact with the eye is required. 20 is 1.43 eV, corresponding to an absorption edge of

Once the axial rays Bl, B2 return to the display, the about 0.87 fun. This material may also be suitable for detector array 14 identifies the portion of the array from visible light; however, if it is desirable to suppress infrawhich the axial ray emanated, by generating a voltage red absorption in the detector, the bandgap can be insignal by a detector pixel located in the array nearest the creased to about 1.9 eV (0.65 u-m) by adding aluminum returned ray. That portion of the array is, of course, the 25 (Al) to form the ternary compound semiconductor Al*. part of the display focussed on by the user. A test pat- Ga^_iAs. (A bandgap of 1.9 eV is obtained for tern from computer 18 is then interlaced with the dis- x=0.38.)

play image to enable initial determination of the eye's The process used to form the detector array is based position. Software, in computer 18, provides a cursor on the LED array process described in the aboveimage for display 12 which is projected on screen 28 at 30 referenced co-pending application Ser. No. 07/643,552, the line-of-sight location. This cursor is interlaced to as a baseline. In this process, the detector material 70 is provide constant feedback to the detector array 14. The first grown on substrate 72 by OMCVD. A release layer interlace frequency can be adjusted to make the cursor 74 is formed that permits the epitaxial film 70 to be visible or not visible to the user. separated from the substrate 72, but separation is de

For the case of a partially transparent system of FIG. 35 ferred until after the front side metallization 76 is 1 in which scenes from the surroundings are superim- formed (FIG. 5A). After metallization of rows of metalposed on the display image, the detector array 14 is lization and mesa etching to delineate the pixels 62, the provided with a narrow band pass filter overlay to surface of the wafer is bonded to a carrier 78 (FIG. 5B). reject all wavelengths except the wavelength of the This carrier is preferably the front panel 54 of display cross hair or cursor, which must be one of the display 40 12. The substrate 72 is then removed to yield a partially primary colors. Suppose for example that the selected processed detector array 14 bonded to a display array color is primary red. In this case, a narrow band red 12. The processing is then completed to form a matrix rejection filter 30 is placed on the outside of the screen addressed two-dimensional array 12 of detector pixels 28, and a narrow red bandpass filter 16 is placed over 62 aligned with the TFT's 64 (indicated by X's) but the pixels of the detector array 14. In this way, the 45 slightly displaced from corresponding pixel electrodes detector array 14 only receives light originating from 66 (indicated by dots) of the display array 12 (FIG. 5C). the display. A second method of accomplishing the Several points need to be emphasized regarding the same result is to use polarizing filters as shown in FIG. formation of the integrated detector array 14 and dis2. In this case the flat panel display 12 is an AMLCD play 12. First, the matrix metallization (not shown) of light valve helmet or head mounted display (HMD), 50 the detector must be positioned over the metallization having a polarizer 40 on its output face. The polarized of the display. In this way, no decrease in the optical nature of the light from the display 40, combined with a aperture of the display is introduced by the metal inter90° crossed polarizer 42 on the screen 28, prevents un- connects of the detector array 14. Second, the detector wanted light from the outside scene from propagating pixels 62 can be made as small as a few microns square to the detector array. 55 provided the detector sensitivity is high enough. Since

Another alternative is to chop or rapidly blink the the TFT's are also in the order of a few microns wide,

video signals from computer 18 for the cursor presenta- detector pixels of such size would not block light,

tion so that software in the computer can subtract the Third, the detector array 14 does not need to use an

background light. Yet, another alternative that can be active matrix, because III-IV materials, such as, GaAs used with LCD displays is to use infrared light that can 60 and AlGaAs are extremely fast detectors (< 1 Jas decay pass through the red filters of the LCD. But this ap- 'time) and so the detector array can be scanned as fast or

proach requires an IR rejection filter on the front of the faster than the display. Since the detector pixels are

viewing screen. It can be seen from the above that there small, they can be placed over the transistors in the

are a number of methods of using the display 12 to active matrix display, resulting in very little reduction

provide a signal for the detector array 14, without inter- 65 in optical aperture of the display,

ference from outside light. The integrated eyetracker device 100 can consist of a

An exploded view of an AMLCD display and mono- pair of units that can be simultaneously scanned by

lithic detector array 14 in accordance with the inven- computer 18 to obtain real time correlation between the

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